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Prof. Dr. rer. nat. Benjamin Butz


Head of research group 
Head of Micro- and Nanoanalytics Facility (MNaF)



PB-A 218/219
+49 271 740-3175
+49 271 740-2545

Web:      Researchgate

Web:      ResearcherID

Universität Siegen
Department Maschinenbau
Research Group for Micro- and Nanoanalytics & -tomography 
Paul-Bonatz-Strasse 9-11
57076 Siegen



Benjamin Butz was born in Otterstadt (south Germany) in 1978. He received his diploma in physics from the University of Karlsruhe (TH) in 2004. Focus of his diploma thesis as well as of his doctorate in Prof. Dagmar Gerthsen’s group (Laboratory of Electron Microscopy, KIT) was the application of advanced TEM techniques to clarify inherent degradation phenomena of functional zirconia ceramics for fuel-cell applications. In 2010, he joined the young group of Prof. Erdmann Spiecker at the Friedrich-Alexander University Erlangen-Nuremberg, where he assisted to successfully establish advanced EM methodology and in situ capabilities for materials science and where he entered new research fields on 2D-materials and nanostructured/-particulated materials. During his research stay in Prof. Robert Sinclair’s group at Stanford University in 2016/2017 (DFG fellowship), he utilized novel in situ techniques like environmental TEM for materials research. In October 2017, he was appointed professor at the mechanical engineering department of the University of Siegen, where he applies advanced SEM, TEM and ion microscopy to investigate the local (micro-)structure and chemistry of applied and novel materials down to the atomic scale. Aim of such studies is to use such knowledge to understand and optimize the material’s fabrication and properties.


Publications of Prof. Dr. Benjamin Butz


Research Fields

  • Functionality and stability of structural and functional materials as well as devices; relationship of structure, bonding, chemistry and functionality
  • Structure formation, phase transitions and solid-state diffusion, formation and properties of defects in bulk/thin-film ceramics, metals & compounds as well as low-dimensional carbon allotropes and dichalcogenides
  • Advanced aberration-corrected and analytical (scanning) transmission electron microscopy including electron diffraction and tomographic techniques, scanning electron microscopy and low-energy electron microscopy
  • Development and application of in situ electron microscopy (heating, electrical/mechanical testing, biasing, environmental microscopy)
  • Development of novel data evaluation and sample preparation methods