SEM

CamScan

The CamScan is a robust SEM combining good, ergonomic design and ease of use with a broad variety of operating functions and features. It has a good specimen compatibility and excellent ease of specimen preparation. It can be used to examine the micro topography of a wide-range of specimens, including bulk materials, powder, fibers, and films, which could not be imaged in either conventional transmission electron microscopy or optical microscopy. The resultant image has a marked three-dimensional appearance. Its magnification can easily be controlled from 10x to 300,000x with a reasonable final resolution (about 20 nm). The specimen stage can be rotated (360°) and tilted (> +/- 50°). Working distances ranging from 58 mm down to 16 mm are available. Due to the spacious sample-chamber, the specimen size can be rather large (several centimeters in all three dimensions) making the CamScan an ideal tool for industry related failure analysis. The images of the specimens can be digitally recorded and stored immediately.

An energy-dispersive X-ray (EDX, EDAX) and wavelength dispersive X-ray (WDX, WDX-3PC) spectroscopy system are attached to our SEM. With the attachments the elemental composition of specimen areas as small as a few cubic micrometers can be obtained qualitatively and quantitatively with high spatial resolution. EDX and WDX can also be used to determine compositional homogeneity and compositional gradients of specimens. These techniques are non-destructive and have a sensitivity of >0.1% for elements heavier than C.