Moderne Methoden der Materialcharakterisierung

Motivation

• Optimization as well as functionalization of a material often aims at its surface or happens on a micro or sub-micron length scale
• Keywords: surface structuring, thin films technology, tailor-made surface energies, nanocomposites
• Any evaluation/characterization needs analytical methods with a resolution higher than the typical structure size of the sample analyzed – structure size in this context can either be grain size, grain boundary width or film thickness of interest (etc.)
• Special challenges are found analyzing semi-conductor-components, storage-media and multi-functional complex film-systems – in many cases film thicknesses of these applications are below 5 nm