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Verfahrenstechnik der Oberflächenmodifikationen

Verfahrenstechnik der Oberflächenmodifikationen


SSSWS: 2ECTS: 2,5Exam: oralProf. Jiang

Introduction to Thin Film Technology

  • The course provides foundations in thin film deposition; emphases the most used techniques.
  • Modern thin film technology has evolved into a sophisticated set of techniques used to increase performance and aesthetic value of many products and make new functional systems and devices.
  • There are following categories of thin film deposition
    • Thermal evaporation
    • Physical vapor deposition (PVD)
    • Chemical vapor deposition (CVD)
    • Chemical methods
    • Electrochemical methods
  • Combinations of these methods gives a large number of deposition techniques with unique impact on the thin film formation.
In general
Time: Thursday, 16:00 (s.t.) - 18:00
Location: Room PB-A 401
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