Verfahrenstechnik der Oberflächenmodifikationen
Introduction to Thin Film Technology
- The course provides foundations in thin film deposition; emphases the most used techniques.
- Modern thin film technology has evolved into a sophisticated set of techniques used to increase performance and aesthetic value of many products and make new functional systems and devices.
- There are following categories of thin film deposition
- Thermal evaporation
- Physical vapor deposition (PVD)
- Chemical vapor deposition (CVD)
- Chemical methods
- Electrochemical methods
- Combinations of these methods gives a large number of deposition techniques with unique impact on the thin film formation.
In general
Time: Thursday, 16:00 (s.t.) - 18:00
Location: Room PB-A 401
Location: Room PB-A 401
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